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Secondary electron microscopy sem electron backscattered diffraction ebsd perspective Illustration and Icon
Secondary electron microscopy sem electron backscattered diffraction ebsd perspective
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A schematic shows an SEM chamber with the electron beam column entering from the top and an EBSD detector inserted from the side. A flat specimen is mounted on a stub and tilted steeply (~70°) toward the detector, aligning for electron backscatter diffraction. The side detector terminates in a circular phosphor screen where Kikuchi patterns are projected. The diagram illustrates the geometric arrangement used in SEM-based EBSD for crystallographic orientation analysis of materials.
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